Fabrication of a Piezoresistive Barometric Pressure Sensor by a Silicon-on-Nothing Technology
نویسندگان
چکیده
منابع مشابه
New Design of Mems piezoresistive pressure sensor
The electromechanical analysis of a piezoresistive pressure microsensor with a square-shaped diaphragm for low-pressure biomedical applications is presented. This analysis is developed through a novel model and a finite element method (FEM) model. A microsensor with a diaphragm 1000 „m length and with thickness=400 µm is studied. The electric response of this microsensor is obtained with applyi...
متن کاملDesign and fabrication of a rapid conductometric pH sensor based on metal-oxide technology
A micro-fabricated metal-oxide based conductometric pH sensor is designed and fabricated in this manuscript. pH sensors have applications in various areas from farming to food processing, human health monitoring, industrial waste products investigation, etc. Accordingly, there is a relatively high demand for a reliable, rapid and precise pH sensor in the market. Relatively precise pH sensors ha...
متن کاملPerformance and package effect of a novel piezoresistive pressure sensor fabricated by front-side etching technology
By applying the etching via technology, this study proposes a novel front-side etching fabrication process for a silicon-based piezoresistive pressure sensor to replace the conventional back-side bulk micro-machining. This novel structure pressure sensor can achieve the distinguishing features of the chip size reduction and fabrication costs degradation. In order to investigate the sensor perfo...
متن کاملDesign Optimization and Fabrication of a Novel Structural SOI Piezoresistive Pressure Sensor with High Accuracy
This paper presents a novel structural piezoresistive pressure sensor with four-grooved membrane combined with rood beam to measure low pressure. In this investigation, the design, optimization, fabrication, and measurements of the sensor are involved. By analyzing the stress distribution and deflection of sensitive elements using finite element method, a novel structure featuring high concentr...
متن کاملa study on insurer solvency by panel data model: the case of iranian insurance market
the aim of this thesis is an approach for assessing insurer’s solvency for iranian insurance companies. we use of economic data with both time series and cross-sectional variation, thus by using the panel data model will survey the insurer solvency.
ذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Sensors
سال: 2019
ISSN: 1687-725X,1687-7268
DOI: 10.1155/2019/5408268